The Clean Room in the Department of Electronic Engineering could be considered the only clean room in an academic environment in Catalonia (and in Spain). The other clean rooms are located in research centers. A large number of bachelor's, master's and doctoral degree students learn in this facility the basic stages of manufacturing electronic devices, such as those found in semiconductor chips.
The Clean Room has all the equipment required to manufacture devices and systems at micro- and nanometric scales. It includes photolithography equipment (1 micron resolution), furnaces, chemical banks, deposition equipment (sputtering, atomic layer deposition or ALD, electron beam, thermal evaporation, plasma-enhanced chemical vapor deposition or PECVD).
The Clean Room facility has two objectives:
- The first is to train people with technological knowledge on the manufacture of micro- and nanoelectronic systems.
- The second is to offer research and the industrial sector the experience of 25 years in the manufacture of electronic devices, particularly solar cells and sensors.