Lithography: equipment for induction and annealing of photoresist on samples ranging from a few mm² to 100 mm wafers. Lithography can be optic (UV, DUV), electronic with final resolutions of 7 nm or done by nanoimprint
Micro& nano systems: microsystems line dedicated to fabrication of MEMS and NEMS. This includes:
- Front/back end alignment exposure
- Chemical mechanical polishing
- Supercritical drying
- Vapor HFetcher
- Molecular bonding
Etching: the available etching chemistries are proper to the materials to be etched and the etching can be chemical or dry, isotropic or anisotropic
Metrological: metrology and monitoring equipment such as optic and electronic microscope, mechanical profilometer, spectroscopic ellipsometer
Deposition, either by pulverisation and evaporation or by plasma:
- Of thin film (in the range from the nanometres to the micrometres)
- Of oxide or metal
Deposition tools for metal, oxides, (SiN, SiO2, HfO2, Al2O3...) and semiconductors (Si, Ge...)
The Upstream Technological Platform (PTA) is a 1000 class clean room resulting from the pooling of technical and human resources of the Nanosciences and Cryogenics Institute (INAC) of CEA and of the Microelectronics Technologies Laboratory (LTM), CNRS and UGA. The clean room extends over 700 m², 350 m² on the premises of the CEA and 350 m² in Grenoble INP, within the CIME clean room.
The PTA offers the technical capabilities needed to cover a wide range of projects in nanosciences and micro- nanotechnologies: complementary methods and equipment facilities for lithography, deposition or etching enable reliable integration of nano-objects and nano-materials or patterning of thin layers in the nanometric range. The PTA can accommodate all types of substrates from small 5 x 5 mm² sample up to the 100 mm wafers. A huge diversity of materials can be processed within a reasonable approach of contamination management
The research fields are numerous: nanoelectronics, MEMS & NEMS, magnetism and spintronics, integration of nano-materials and nano-objects, photonics... The purpose of the facility is both to provide the necessary means and skills to researchers, and to welcome industrial companies looking for a place to develop their projects.
Flexibility, ease of access and use, are the cornerstone of the management of the PTA. This pooling of facilities between the major players of upstream research in Grenoble means that a specific management system had been set up combining the INAC's and the LTM's complementary views and needs: users will find both a state of the art facility and an optimal flexibility.