OtaNano consists of three facilities, Low Temperature Laboratory (LTL), Nanofab and NanoMicroscopy Centre (NMC). LTL offers a broad selection of devices for research in low temperatures and nano electronics. It includes a collection of cryostats for sub 1 K research, three nuclear demagnetization cryostats for sub mK temperatures and other research equipment, including micro-Raman and atomic force microscope for sample characterisation. Electron beam lithography is available for sample fabrication with 50 nm resolution in a semi-cleanroom environment. Nanofab is the largest micro and nano fabrication cleanroom in Northern Europe, with a total of 2600 m2 lab space for state-of-the-art research and technology development. It enables fabrication of micro and nano structures, quantum devices, microsystems and microfluidic chips, micro and nano sensors, photonics and optoelectronic devices. Also, small scale mass production and fabrication of prototypes is possible in Nanofab. NMC provides high-resolution microscopy for imaging and characterisation of hard, soft and biological materials. NMC equipment include the only sub-Ångström transmission electron microscope (TEM) in Finland, liquid helium cooled cryo-TEM, three other TEMs, scanning electron microscopes (SEM), an atomic force microscope (AFM) and X-ray scattering devices (SAXS/WAXS/XRD).
OtaNano offers a wide variety of fabrication processes and equipment for micro- and nanostructures. The facilities cover a comprehensive range of imaging and characterisation equipment, including electron microscopy, nanomicroscopy, and x-ray scattering devices. Key activities include ultra-low-temperature conductivity and high-frequency measurements. OtaNano is a top-level learning environment for young researchers and an international centre for scientific research. The facilities are important for scientists as well as for high-tech companies working with micro- and nano-technology applications. OtaNano is a national platform to develop innovative enabling technologies and apply them to practical micro- and nano-systems. OtaNano enjoys a rare position among Finnish research infrastructures for having over twenty years of international infrastructure cooperation through European large-scale infrastructure projects. OtaNano is an open access research infrastructure, operated by Aalto University and VTT, and is available for academic and commercial users internationally.