Electricity:
- Manual point test station
- Semi-automatic peak test station
- Measurements 4 pseudo MOS tips
- Hall effect measurement under peaks
- Parameter analysers
- Impedance analysers
- Quasi-static C-V (QSCV) measuring system
- Charge pumping
- DLTS
- Very low noise semi-automatic characterisation bench
- Vector network analyser<10MHz
- SHG prototype
- 4-point mechanical bending bench
- AFM with electrical modes (TUNA, EFM, KFM ...)
- Electrical characterisation bench equipped with a camera
- Electrical measuring station under peaks
Radiofrequency (RF) and microwave (MW):
- Semi-automatic and manual probe stations
- Vector network analyser, spectrum and signal analysers
- Analog signal generator
- Microwave power meter
- Digital sampling oscilloscopes (real time and equivalent time)
Optics / Photonics:
- Quantum efficiency and reflectivity measurements
- Measurements of intrinsic gains / losses of an optical chip
- Optical guide mode intensity profile
- M-lines
- Spectral analysis
- YAG laser
- Holography bench
- 7 THz spectroscopy benches
- Raman spectroscopy (Impact)
- X-ray photoelectronic spectroscopy (Impact)
Physico-chemical characterisation:
- XPS spectroscopy: IMPACTX LTM equipment
- Ellipsometric spectroscopy: IMPACT Ellipso LTM equipment
- Raman spectroscopy: Labram LMGP, IMPACT_Raman LTM equipment
- Photoluminescence spectroscopy (PL): IMPACT_PL LTM equipment
- FTIR spectroscopy: Vertex 70 and Vertex 70V LMGP equipment
- UV-VIS –NIR spectroscopy: Perkin Elmer Lambda 35 (Standard) and Lambda 950 (high-performance) LMGP equipment
Low temperature:
- Hall effect measurement under peaks
- Cryogenic station
- Cryostats for measurement on encapsulated devices
- Cryostat for Hall effect measurement on encapsulated devices
- Hall Effect cryostat
Magnetic field:
- Hall effect measurement under peaks
- Cryostat for Hall Effect measurement on encapsulated devices
- Transverse magnetoresistance and Hall effect
- Hall Effect cryostat
- Magnetic material tester
- VSM vibrating sample magnetometer
- Kerr NanoMoke magnetometer
Power electronics: spike test station CARAPACE, energy conversion platform
MEMS / NEMS:
- Characterisation bench for piezoelectric materials and components
- Micro / nanofluidic characterisation bench
- Servo vibrator with signal replicator
- Slaved vibrating pot
- Low frequency spike system with camera and acquisition software + synchronous detection + impedance meter + profilometer
- Differential laser interferometer / velocimeter with motorized micrometric XYZ table
high-speed digital:
- Communication signal analyser, , bit error rate analyser
- Arbitrary waveform generator, vector signal generator
Antennas:
- Faradized and fully anechoic chamber
- Far field antenna range
- 3D radiation pattern measurement system
Near-field communication (NFC):
- AFM in liquid medium
- AFM / STM ultra vacuum
- AFM with electrical modes under controlled mechanical stress
Packaging: interconnection between a circuit (chip) with its environment (case, printed circuit, hybrid circuit) using the Wedge Bonding method
Satellites:
- Shaping of samples, packaging and prototyping (micro-saw, lapping-polishing, micro-welding)
- Material deposition
- Microscopy...
OPE)N(RA's mission is to pool laboratory resources to optimize their use, allow Federation of Micro and Nanotechnologies (FMNT) partners to access a wider variety of equipment and the expertise of managers, and to offer a centralised access to external users.
The means available within the FMNT federation allow, among other things, the functional characterisation of materials and components, the characterisation of materials and components for spintronics, the functional characterisation in biology, electrical and multi-physical characterisation, measurements of microwave, optomicrowave and electromagnetic compatibility, characterisation of ultra-fast signals, characterisation of integrated optics components and circuits, electromechanical characterisation of piezoelectric materials and microgenerators.