Microelectromechanical Systems
This interesting course introduces the general principles and tools of the microelectromechanical systems (MEMS) and devices and their applications
The course covers principles such as force scaling, elasticity, piezo-resistance and piezoelectricity, electrostatic actuation and sensing, and then describes several solutions for different applications, such as resonators, inertial sensors, microfluidics and electro-kinetics, RF-MEMS. The last topic describes the specific fabrication processes for MEMS, with particular attention to sustainability in MEMS cycle of life.
Title of Offering
Microelectromechanical SystemsAny further Information?
This course requires physical presence. Please copy this link into your browser to learn more about the application procedures for Unite! partner university students.
https://telecos.upc.edu/en/mobility/foreign-students